Application: Medical Equipment Optical Platform
• Plane degree after adsorption silicon wafers ¡Ü5um
• Heating time: 20 ¡æ to 55 ¡æ time ¡Ü30s
• Treatment time: 55 ¡æ to 20 ¡æ time ¡Ü 55s
• Digital pressure gauge reading after adsorbing chip rising cooling process <-85kPa
• Digital pressure gauge readings of unsustainable chip> -10kPa
